Papers by Author: Arvydas Palevicius

Abstract: In this work we present an optical laser based method for characterization of periodical microstructure. It allows indirect evaluation of geometrical and optical parameters of periodical microstructures. Proposed method is applicable for optimization and control of technological processes in the cases when traditional measurement techniques are not suitable. The main experimental results are compared with the computer simulations where the standard programs PCGrate-SX6.0 and and GSolver V4.20b were employed. Error of estimation of geometrical parameters of periodical microstructures by comparing theoretical and experimental values of diffraction efficiencies of periodical microstructures is less than 5%.

Abstract: Hybrid experimental – numerical techniques are applied to the problem of the interpretation of patterns of fringes that are generated by non-contact full-field experimental methods applied for analysis of dynamic displacement fields of MEMS components. It is shown that even rather simple cantilever beam of a MEMS switch can exhibit complex dynamical response due to the nonlinearities of interactions and the surrounding noise. In many instances the interpretation of experimental results is possible only after numerical simulation of MEMS components in virtual computational environments.