Papers by Author: Baik Woo Lee

Abstract: A new method [1] to evaluate indentation flow curves using an instrumented indentation test has been applied to many materials for several years. Though the method produces relatively good results compared to uniaxial tensile tests, a few parameters had not been verified by theoretical or numerical methods. In this study, proportional constants of representative strain and representative stress were verified using finite element analysis and proven to be unaffected by the elastic property and strain level. The constants were generally dependent on the plastic property; however, one combination of the constants is independent of all properties. The values of this combination are consistent with early research and produced overlapping indentation flow curves with uniaxial curves.

Abstract: Amorphous silicon carbide (a-SiC) films were deposited using molecular dynamics simulations employing the Tersoff potential. The structure and intrinsic stress of a-SiC films changed dramatically with changes in such principal deposition process parameters as substrate temperature and incident energy. Changes in structure and intrinsic stress with deposition process parameters were analyzed.