Papers by Author: Cai Feng Wang

Abstract: In MEMS, the size of micro-structure is usually in the micron and even nanoscale. It's easier to form capillary phenomenon than the macroscopic system. In view of this phenomenon, this article is based on the micro-mechanical gyroscope as the research object, to analyze the occurrence of capillary condensation of adhesion phenomenon. Firstly, we derive the Kelvin equation for capillary condensation, and then combination of the Kelvin equation introduce the capillary condensation of the adhesion phenomenon; Secondly, it analyzes the dynamics characteristics of its structure existing the liquid bridge, and analyzes the causes of the liquid bridge; Finally, it analyzes the capillary adhesion phenomena on the performance of the micro-mechanical gyroscope,as well as how to avoid the generation of capillary condensation adhesion.

Abstract: Based on the calculation and analysis of three kinds of elastic beam’s stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement，forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam’s width, the bow beam’s force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam’s stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.