Papers by Author: Da Rong Chen

Abstract: Particle’s behavior in the slurry with power-law viscosity shows great effect on the wafer surface polishing. Hydrodynamic pressure is periodically generated on the surface asperity when particles are passing through it. Fatigue fracture occurs under the effect of periodical pressure and it begins from the top to the bottom of the asperity. Based on the energy-balance fracture theory, the removal rate is calculated and it shows good agreement with experiment data.

Abstract: By means of the density functional theory on the basis of generalized gradient approximation, the reaction paths of the dehydrogenation from the diamond (100) surface was deduced due to the reaction heat. Moreover, the most stable structure of the hydride diamond (100) surface was obtained. The results indicate that the dehydrogenation is easier to take place at the same C-C dimer and forms the parallel geometries. The parallel 1×1:1.5H, 2×1:H and parallel 2×1:0.5H are the intermediate products during the hydrogen desorption process, while, 2×1:H is the most stable structure of the hydride diamond (100) surfaces. The calculated reaction heat is in accordance with the experimental results.

Abstract: Diamond like carbon (DLC) films were prepared on Si wafer, using laser induced arc deposition (Laser arc) technique. Results of Raman Spectra analysis showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological properties were investigated by using Atomic Force Microscope and Nano-Scratch Tester. Influences of arc voltage, substrate bias voltage, target materials and substrate pre-treatment methods upon the film structures and film properties were studied.