Papers by Author: Francesco Pipia

Abstract: GST is an alloy composed by Ge, Sb, Te whose importance is increasing more and more in semiconductors manufacturing due to its usage in Phase Change Memories (PCM) architecture, as a charge storage element. As a consequence its integration in PCM architectures requires a deeper understanding of the effect that commonly used wet cleanings may have on the surface of the alloy.

Abstract: Tungsten importance in semiconductor manufacturing is renewed more and more due to its usage not only as metallization for plugs, but also in metal gates architectures. As the scaling down of the devices is becoming aggressive, the metal interfaces become more critical. Hence, a deeper understanding of the evolution of the W surface after wet cleaning processes is becoming increasingly more important.