HomeG.M.W. Kroesen

Papers by Author: G.M.W. Kroesen

Paper TitlePage

Negatively Charged Particles in Fluorocarbon RF Etch Plasmas: Density Measurements Using Microwave Resonance and the Photodetachment Effect

Authors: M. Haverlag, Akihiro Kono, G.M.W. Kroesen, F.J. de Hoog

235