Papers by Author: Gregory Abadias

Abstract: The effect of chemical composition on the bonding environment of Cu, in a series of Ti1-x Cux and TiN/Cu films, is studied using X-Ray Absorption Spectroscopies (XAFS) at the Cu-K-edge. The EXAFS analysis reveals that in all studied samples Cu is amorphous. However, its bonding environment depends on the chemical composition. More specifically, in the Ti1-xCux films, Cu is coordinated with Ti and Cu and belongs both to intermetallic TiCu and to an amorphous Cu matrix. The coordination number of Cu, i.e., the sum of Ti and Cu first neighbours, increases systematically from 6.3 ± 0.7 to 10.6 ± 0.9 when the Cu content increases from 24.1 to 52.7 at%. On the contrary, in the TiN/Cu films, the type of atoms that consists the 1st nearest neighbour shell of Cu varies as a function of the Cu concentration. More specifically, in the TiN/Cu film with the lowest Cu content (27.3 at%), intermetallic TiCu is detected. At intermediate Cu concentration (37.8 at%), Cu is bonded to both Ti and Cu atoms. Finally, in the TiN/Cu film with the highest Cu content (67.7 at%), Cu is metallic.

Abstract: The stress state and intermixing in epitaxial Ni/Mo multilayers grown on (11 2 0) sapphire substrates are investigated using X-ray Diffraction (XRD). Two deposition techniques were used, namely ion beam sputtering (IBS) and magnetron sputtering (MS), to vary the energy of the deposited species. In both cases, high-quality superlattices with a Nishiyama-Wasserman epitaxial relationship Ni [110] (111) // Mo [001] (110) were obtained. The residual stress state appears rather complex, resulting from two contributions: a growth-stress whose magnitude and sign depend on growth conditions and coherency stresses of opposite signs in the two elemental sublayers (tensile for Ni and compressive for Mo). Post-growth ion irradiation at low fluences was used to induce structural changes in a controlled way. For the case of IBS, it resulted in partial stress relaxation, as the growth stress could be almost fully relaxed, while the coherency stresses remained unchanged. For the case of MS, a distinct behavior was found: a stress increase of the tensile component of Mo-sublayers was observed, while a stress reduction of the compressive component was noticed. We attribute this phenomenon to ion irradiation induced intermixing. For the Ni sublayers, this intermixing leads to a stress relaxation. The modeling of the stress evolution during ion irradiation was performed using a triaxial stress analysis which enabled us to determine the ‘stress-free and defect-free lattice parameter’, solely linked to chemical effect.