Papers by Author: Hiromichi Onikura

Abstract: This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 µm in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 µm diameter ruby sphere.

Abstract: The present paper deals with the development of micro compound tools and their application to the micro drilling. The micro compound tool consists of a micro drill part and an electroplated part with a nominal finishing diameter of 100 µm and they are fabricated by grinding and electroplating processes. Fabricated tools are used in drilling tests with or without ultrasonic vibration. Influences of drill part geometry on burr formation and influences of diamond grit size on peeling of the electroplating layer are investigated. As the results, secondary cutting edges do not seem to have remarkable ability for reduction of burrs. And large size of diamond grit at the electroplated part of a micro compound tool with a small difference between a diameter of electroplated part and a diameter of drill part seems to be effective in preventing peeling of the electroplating layer and improving drilling performance.