Papers by Author: Ikunori Yokoi

Paper TitlePage

The Role of Oxidant in HF-Based Solution for Noble Metal Removal from Substrate
Authors: Geun Min Choi, Ikunori Yokoi, Tadahiro Ohmi
267
A Hydrogenated Water Application to Semiconductor Manufacturing
Authors: Ikunori Yokoi, Geun Min Choi, Yoshio Yamazaki, Tadahiro Ohmi
71
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