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Papers by Author: J. Lärz

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Evaluation of p-n Junction Position and Channel Length in Si Devices with Resolution of a Few Nanometers by Low-Energy EBIC

Authors: Martin Kittler, J. Lärz

77

Electrical Properties of Defects in Multicrystalline Silicon

Authors: Martin Kittler, J. Lärz, G. Morgenstern, Winfried Seifert

373