Papers by Author: Jan Pokorny

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Low Pressure RF Plasma Jet Sputtering Technique Applied to Ferroelectric Films: Ba1-x SrxTiO3
Authors: Alexander Deyneka, Zdenek Hubička, V.A. Trepakov, Gunnar Suchaneck, Lubomir Jastrabik, Gerald Gerlach, Jan Pokorny, Dasgmar Chvostova, J. Olejníček
Abstract: Technology aspects and characterization of BaxSr1-xTiO3 (BST) films fabricated with low pressure plasma jet technique are presented. BST films were deposited on silicon coated with Pt/TiO2/SiO2 and on bare Si substrates. The nozzles-type RF hollow cathode has been fabricated from hot pressed BaTiO3, SrTiO3, and BST ceramics. Controlling of RF voltage, RF current and substrate temperature allowed us to deposit reproducible films with controlled grain size. Hysteresis loops, ellipsometric and micro-Raman investigation results are presented and discussed.
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