Papers by Author: Jian Hua Zhu

Abstract: In this paper, TiO₂/Ag/TiO₂ and TiO₂/Ag/ZnS films were prepared by evaporation coating (EC) and magnetron sputtering (MS). To test the resistance and light transmission rate to characterize the coating effect, both the size of indirect resistance that the relative thickness of the situation. By comparing the single magnetron sputtering and evaporation coating fabricated by the two transparent conductive oxide films (TCO) material conductivity and light transmission properties, determine a reasonable process. Firstly, the first layer is TiO₂ film by magnetron sputtering, and then coating Ag film and ZnS film plated by evaporation, the final form of TiO₂/Ag/ZnS film, which ha_{Subscript text}d much higher transmittance than TiO₂/Ag/TiO₂ at the same resistanc_{Subscript text}e.

Abstract: This resistance by tests to simulate the sputtering thickness distribution and the relative value, we try to reduce the degree of uneven thickness by designing baffle shape for the coating equipment. In view of the structural characteristics of the device and the deposition of complex principles, theory and practice there are still some gaps, according to the measured data (resistance value) to be constantly revised to optimize and baffle design to achieve greater uniformity of product thickness. For example, to meet the resistivity greater than or equal 9.6 Ω and the average transmittance above 80%, TiO₂/Ag/TiO₂ film fully met the requirements of practical applications by applying improved baffle. Concluding remarks are stated at the end of the abstract text. Based on the use of a simple baffle design and improvement, we had achieved good results in mastering the sputtering parameters.