Papers by Author: Juan Carlos Cheang-Wong

Abstract: Spherical submicrometer-sized silica particles were prepared from a reaction mixture containing tetraethoxysilane, ammonia and ethanol, and deposited onto silicon wafers. The properties of these SiO2 particles depend on their size, size distribution and shape. Even if some of these characteristics can be perfectly controlled by appropriate synthesis conditions, several alternative approaches must be explored in order to modify the shape of silica particles. The samples were then irradiated at room temperature with Si ions at different energies (4, 6 and 8 MeV) and fluences up to 5×1015 Si/cm2, at an angle of 45° with respect to the sample surface. After the Si irradiation the spherical silica particles turned into ellipsoidal particles, as a result of the increase of the particle dimension perpendicular to the ion beam and a decrease in the parallel direction. This effect increases with the ion fluence and depends on the electronic energy loss of the impinging ions. We observed that the particle deformation decreases with the beam energy, mainly because our samples were irradiated at room temperature. Thermal effects must be studied in detail in order to elucidate the complete deformation mechanism, as the existence of additional mechanisms related to the electronic energy loss effects can not be excluded.

Abstract: 6H-SiC single crystalline substrates were implanted at room temperature with 2 MeV Al2+ ions to fluences from 2×1014 Al2+ cm-2 to 7×1014 Al2+ cm-2 and with different current densities (from 6.6 to 33×1010 Al2+ cm-2 s-1). The depth profile of the damage induced by the Al2+ ions was determined by Backscattering Spectrometry in channeling geometry (BS/C) with a 3.5 MeV He2+ beam. The BS/C spectra were evaluated using the RBX code. The samples were subsequently annealed at 1100°C in N2 for one hour, in order to analyze their structural recovery by BS/C and the amount of the remaining defects by means of Electron Paramagnetic Resonance (EPR). The results from the BS/C spectra corresponding to the as-implanted samples indicate that the damage depends strongly on the total fluence but also, although to a lesser extent, on the beam current density. The BS/C measurements reveal that all the samples, except the one implanted with the highest fluence, recover completely their original crystalline structure after the annealing. Furthermore the angular anisotropy of the EPR spectra indicates that the implanted region recovered a good crystallinity, although some residual defects were observed.