Papers by Author: Jun Hyub Park

Abstract: This paper represents the development of 3-axises loadcell for measuring the side-force of the suspension module of MPV (Multi Purposed Vehicle). The side force causes the failure of damper, such as leakage. The loadcell was developed using strain gauges, and the Wheastone bridge circuit to compensate for the cross-talk between each axises and the measurement error by temperature. Structure analysis of loadcell was accomplished with FEM (Finite Element Method) to optimize the location of strain gages. The design optimization for the important factors that have effects on performance of loadcell was accomplished by using DOE (Design of Experiment). Loadcell was produced and successfully tested, showing good sensitivity and low cross-talk. The cross-talk of the developed loadcell is below 2%. The measured history using the manufactured load cell will be utilized in the vibration, and fatigue analysis in the future.

Abstract: The cyclic crack tip opening displacement is well related to fatigue crack opening behavior. In this paper, we investigate the effect of the maximum stress intensity factor, Kmax, when predicting fatigue crack opening behavior using the cyclic crack tip opening displacement obtained from FEA. The commercial finite element code, ANSYS, for fatigue crack closure analysis in this study is used. We derive the prediction formula of crack opening behavior when using the cyclic crack tip displacement obtained from the FEA. The numerical prediction shows the good results regardless of stress ratios. It is confirmed that the crack opening behavior depends upon the maximum stress intensity factor Kmax.

Abstract: This paper describes new structure of specimen easy to manipulate, align and grip a thin-film and test machine for a fatigue test. High cycle fatigue test has been performed on tensile type specimen of Al-3%Ti alloy using the newly developed fatigue test machine. The material used in this study was Al-3%Ti thin film, which was used in RF MEMS switch. The structure of the suggested specimen has two holes and several bridges. The holes at centre of grip end are able to make alignment and gripping easy. The bridges are to remove the side support strip easily and extract specimen from wafer without sawing. The test machine was developed using the voice coil of speaker. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement. Fatigue tests was performed on 7 specimens. The thickness and width of the thin film of specimen are 1.0μm and 150μm, respectively. The fatigue strength coefficient and the fatigue strength exponent of Al-3%Ti alloy micro-sized specimen are determined to be 164MPa and -0.01322, respectively

Abstract: A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

Abstract: Fatigue crack propagation behavior under cyclic tensile or torsional loading with biaxial static loads has been investigated. Two different biaxial loading systems, i.e. cyclic tensile loading with static torsional load and cyclic torsional loading with static tensile load, were employed to thin-walled tubular specimens. The crack propagation was measured by two crack gages mounted near the notch and crack opening level was measured by unloading compliance method. The directions of the fatigue crack propagated under respective biaxial loading conditions were examined and the growth rates were evaluated by using several cyclic parameters, including equivalent stress intensity factor range,
Keff, crack tip opening displacement range,
CTD, minimum strain energy density factor range,
Smin. Furthermore, the growth rates were evaluated by effective cyclic parameters considering crack closure. It was found that the biaxial static stress superimposed on the cyclic tensile or torsional loading tests has no influence on the propagation directions of the cracks. Furthermore, it was shown that the fatigue crack growth rates under biaixial faigue loading were well expressed by using the cyclic fatigue parameters,
Keq,eff,
CTDeff,
Smin,eff considering crack closure effect.

Abstract: This paper describes a novel test procedure, new structure of specimen easy to manipulate, align and grip a thin-film and test machine for a tensile and fatigue test. For the proposed specimen, the surroundings of the specimen including the side support strips except for six bridges are etched during the fabrication of the specimen, which in turn makes it possible to cut off easily the specimen from the wafer by minimizing a damage to the test film and also possible to produce the specimen in mass production. For the present specimen, a small hole is made at the grip end and using a small pin for setting the specimen onto the tester, the setting process and alignment of specimen is much easier, compared to the specimen proposed by Sharpe et al. To gain confidence in reliability of testing results, pre-test using the Al-3%Ti is performed, which is widely used in the RF switch and other MEMS devices. Tensile tests are performed, from which tensile strengths of the Al-3%Ti are measured as 343±16.22MPa at 200μm width and 1.1μm thickness.

Abstract: This paper presents high cycle fatigue properties of a Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480.0μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and –0.1514, respectively.

Abstract: This paper presents a novel experimental method to investigate the strength of material, Al-3%Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3%Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1µm and 480µm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3%Ti was 144MPa.

Abstract: A new method to improve the wet etching characteristics is described. The anisotropic wet-etching of (100) Si with megasonic wave has been studied in KOH solution. Etching characteristics of p-type (100) 6inch Si have been explored with and without megasonic irradiation. It has been observed that megasonic irradiation improves the characteristics of wet etching such as the etch rate, etch uniformity, surface roughness. The etching uniformity was less than ±1% on the whole wafer. The initial root-mean-squre roughness(Rrms) of single crystal silicon is 0.23nm [1]. It has been reported that the roughnesses with magnetic stirring and ultrasonic agitation were 566nm and 66nm [3]. But with megasonic irradiation, the Rrms of 1.7nm was achieved for the surface of 37µm depth. Wet etching of silicon with megasonic irradiation can maintain nearly the original surface roughness during etching. The results have verified that the megasonic irradiation is an effective way to improve the etching characteristics - the etch rate, etch uniformity and surface roughness.

Abstract: Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems (MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of materials used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed an axial testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, new techniques and procedures for measuring strength are described.