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Papers by Author: Jun ichi Ida

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Particle Removal Mechanism of Hydrogenated Ultrapure Water with Megasonic Irradiation

Authors: Hiroshi Morita, Jun ichi Ida, Osamu Ota, Kazumi Tsukamoto, Tadahiro Ohmi

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Hydrogenated Ultrapure Water Production System for Future Wet Cleaning Process

Authors: Hiroshi Morita, Jun ichi Ida, T. Mizuniwa, Tadahiro Ohmi

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