Papers by Author: Koichi Mizutani

Abstract: Amorphous NiP plate is used as a mold of precision optical parts owing to the superior machinability. In the amorphous NiP plate, some pores, whose diameter is about 100m, are generated occasionally. At present, the amorphous NiP plates with pore are rejected. However, because size of the mold becomes large in recent years, the possibility of pores becomes high. In addition, the cost of the amorphous NiP plate also becomes high. Therefore, reparation method of the pore in the amorphous NiP plate should be developed. In this paper, laser assist powder jet deposition is proposed as a reparation method of the amorphous NiP plate. And fundamental experiments are carried out.

Abstract: Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [1]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.