Papers by Author: M. Chang

Abstract: Potassium Titanium Oxide Phosphate (KTP) is a new nonlinear frequency-conversion crystal. It has chemical stability, high nonlinear coefficient, high damage threshold, easily-polished surface, and a broad transparency range. It is be used in solid green laser with medium and low power widely. The requirement for surface roughness is less than 1nm.In this paper, the removal rate and surface roughness are discussed with different velocity, pressure and size of abrasive powder. In order to satisfy the requirement, new polishing techniques with ultra-precision plane polishing machine (Nanopoli-100), and fine AL2O3, SiO2 powders are proposed in this study. The final surface roughness of the KTP is less than 1nm.The machining process and characteristics are also indicated.

Abstract: Scanning probe microscopy (SPM) has proved to be a powerful tool not only for imaging but also for nanofabrication. SPM-based nanofabrication comprises manipulation of atoms or molecules and SPM-based nanolithography. SPM-based nanolithography, referred to as scanning probe lithography (SPL) in this review, holds good promise for fabrication of nanometer-scale patterns as an emerging generic lithography technique that STM, AFM, and SNOM are directly or otherwise used to pattern nanometer-scale features under appropriate conditions. Patterning methods including mechanical SPL, electrical SPL, thermal SPL, and optical SPL, are described in terms of SPL mechanisms. The newly developed variations of the above-mentioned SPL methods such as dip pen nanolithography, nanoshaving and nanografting, replacement lithography, constructive nanolithography, nanojet lithography, and electrostatic lithography, are also illustrated respectively. Analyses of prospective application of these SPL methods are presented finally.

Abstract: STAVAX ESR（S-136）is a type of high stainless steel, used in precision mould widely . It has fine anticorrosion, polishing-alike, wearable，good process capacity and quench stability. To obtain the smooth surface of STAVAX ESR, the material removal mechanism in the paper is discussed. The experiment is processed on the ultra-precision plane polishing machine (Nanopoli-100). The experiment processes are as follows. Rough lapping and Ultra-precision lapping: the material of lapping pads is cast iron. #1000Al203 (10wt%) abrasive powders are used in rough lapping. Finally, surface roughness is 62nm. In ultra-precision lapping, abrasive powders are for #4000Al203（10wt%）. Removal rate is 1nm with linear velocity 8.6m/min, pressure 3.65MPa. After 4000 rounds, surface roughness is 35nm.Ultra precision polishing: The super smooth surfaces of STAVAX ESR（S-136）with 5nm roughness have been obtained by adopting SiO2(> 30wt%) slurry and soft tin polisher in the experiment.