Papers by Author: Masashi Uematsu

Abstract: Diffusion behaviors of aluminum (Al) in zinc-oxide (ZnO) single crystals were measured by means of ion implantation technique and SIMS depth profiling. It was found that Al concentration profile had a peculiar shape with a constant-concentration region and a steep tail, which was also found in profiles of other donors such as Ga and In. Detailed analysis of the profiles revealed that the diffusivity of Al was proportional to the square of Al concentration and its intrinsic diffusivity was much smaller than previously reported values. Oxygen diffusion experiments were also performed and the implantation of Al ions enhanced the oxygen diffusion coefficients by about 20 times. This result indicates that oxygen interstitial diffusion occurs in n-type ZnO.

Abstract: The effect of the SiO2/Si interface on Si self-diffusion in SiO2 during thermal oxidation was investigated using silicon isotopes. Samples with natSiO2/28Si heterostructures were oxidized at 1150 ~ 1250 °C and the 30Si diffusion in 28SiO2 during the thermal oxidation was investigated by secondary ion mass spectrometry (SIMS) measurements. Near the SiO2/Si interface, a significant profile broadening of the 30Si isotope from natSiO2 toward the newly grown 28SiO2 was observed. This 30Si self-diffusivity sharply decreases with oxidation time and hence with increasing distance between 30Si diffusion region and the interface. This distance-dependent 30Si self-diffusion was simulated taking into account the effect of Si species generated at the interface upon oxidation and diffusing into SiO2 to enhance Si self-diffusion. The simulation fits the SIMS profiles and these results indicate that Si species, most likely SiO, are emitted from the SiO2/Si interface upon Si thermal oxidation to release the oxidation-induced stress, as has been predicted by recent theoretical studies. Furthermore, combined with our recent results on O self-diffusion, the diffusion behavior of the emitted SiO near the SiO2/Si interface is discussed.

Abstract: The effect of the SiO2/Si interface on oxygen self-diffusion in SiO2 during thermal oxidation was investigated using oxygen isotopes. A Si18O2 layer was first grown in 18O2 and then the sample was reoxidized in 16O2 at 900 ~ 1100 °C. The O diffusion in SiO2 during the 16O2 oxidation was investigated by secondary ion mass spectrometry (SIMS) measurements. Near the SiO2/Si interface, a significant broadening of the 18O profile toward the newly grown Si16O2 was observed. This 18O diffusion became slower with oxidation time and hence with increasing distance between 18O diffusion region and the interface. This distance-dependent 18O self-diffusion was simulated taking into account the effect of SiO generated at the interface upon oxidation and diffusing into SiO2 to enhance O self-diffusion. The simulation fits the SIMS profiles and shows that the SiO diffusion is greatly retarded by the oxidation with O2 from the oxygen-containing atmosphere and that the O self-diffusion therefore becomes distance-dependent. In addition, near the SiO2 surface, 16O diffusion profiles develop with the 16O2 oxidation time from the surface into the initially grown Si18O2. The integrated surface 16O concentration increases with oxidation time and the SiO from the interface affects the O self-diffusion near the surface as well.

Abstract: We present a unified simulation of diffusion in silicon (Si) and silicon dioxide (SiO2) that is based on the diffusing dopant species and point defects that primarily contribute to the diffusion. We first present the simulation of phosphorus (P) diffusion in Si based on the integrated diffusion model that we have developed and elucidate the mechanism of the appearance of the anomalous P in-diffusion profile. The vacancy mechanism governs P diffusion in the plateau region, while the kick-out mechanism governs it in the deeper region, where Si self-interstitials dominate in the kink region and P interstitials dominate in the tail region. Next, we present the simulation of boron (B) diffusion and Si self-diffusion in SiO2. We examined the co-diffusion of implanted B and 30Si in thermally grown 28SiO2, which shows increasing diffusivities with decreasing distance between the diffusers and Si/SiO2 interface and with higher B concentration in SiO2. We propose a model in which SiO molecules generated at the interface and diffusing into SiO2 enhance both B diffusion and Si self-diffusion. The simulation showed that the SiO diffusion is so slow that the SiO concentration at the B and 30Si region critically depends on the distance from the interface. In addition, the simulation predicts the possibility of time-dependent diffusivities for B and Si because more SiO molecules should be arriving from the interface with time, and this time dependence was experimentally observed. Moreover, based on the B concentration dependence, the simulation result indicates that B and Si atoms in SiO2 diffuse correlatively via SiO; namely, the enhanced SiO diffusion by the existence of B enhances B diffusion and Si self-diffusion.