Papers by Author: Ming Zhang

Abstract: In this paper, scanning electron moiré method is used to measure the mechanical behavior of Ferro-based shape memory alloys(SMA). The moiré patterns are formed by the interference between a 1000 lines/mm cross-type specimen grating (which is fabricated using electron beam lithography) and the scanning lines of Scanning Electron Microscope (SEM). When the specimen is subjected to uniform tension load at the room temperature, the unloading residual strain values in the different regions under the same tensile load and the values in the same region under different tensile loads are compared respectively. The shape memory effect is also studied. From the experimental results, it can be concluded that the proposed moiré method is highly accurate to measure the mechanical behavior of microscopic field.

Abstract: In this paper, a novel nano-moiré grating fabrication technique was proposed for nanometer deformation measurement. The grating fabrication process was performed with the aid of Atomic Force Microscope (AFM) on the basis of micro-fabrication technique. On the analysis of some correlative factors of influencing grating line quality, some important experimental parameters were optimized. In this study, some parallel and cross nano-gratings with frequencies of from 10000lines/mm to 20000lines/mm were fabricated. The successful experimental results demonstrate that the nano-grating fabrication technique is feasible and also indicated that these nano-gratings with nano-moiré method can be applied to deformation measurement, which offers a nanometer sensitivity and spatial resolution.