Papers by Author: Mituo Nagao

Abstract: MEM (Micro-Electro-Mechanical System) is the integration system of mechanical elements, sensors, actuators, and electronics on a silicon substrate using the micro fabrication technology, in general. A new MEMS formation technology is proposed in this paper. The improved drop-on-demand ink jet was used and the MEMS was formed on the plastics and silicon substrate. The plastics resins were injected from the drop-on-demand head on the substrate and the dropped resins were cured using ultraviolet rays. Thus micro lenses were formed.