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Articles by author: Salah Sahli

• Characterization of a-C:H Thin Films Deposited from C₂H₄ by PECVD Microwave Discharge
  Published in: Thin Films and Porous Materials (p49)
• Characterization of SiOF Thin Films Deposited by PECVD from Hexamethyldisiloxane in Mixture with Oxygen and CF₄
  Published in: Thin Films and Porous Materials (p59)
• Fluid Model Simulation of DC Glow Discharges
  Published in: Laser and Plasma Applications in Materials Science (p116)
• Investigation on Thin Films Deposited by PECVD from a DiPhenylMethylSilane (DPMS) Vapors or Mixed with Oxygen for Low-K Material Application
  Published in: Laser and Plasma Applications in Materials Science (p35)
• OES Diagnostics of HMDSO/O₂/CF₄ Microwave Plasma for SiOC_xF_y Films Deposition
  Published in: Laser and Plasma Applications in Materials Science (p152)
• Optical Properties of a-C:H Films Deposited by Plasma Microwave Discharge with Controlling Substrate Temperature
  Published in: Laser and Plasma Applications in Materials Science (p200)
• PIC-MC Simulation Method of DC Discharge Plasmas
  Published in: Laser and Plasma Applications in Materials Science (p121)
• Water Molecule Sensitive Layers Deposited from Hexamethyldisiloxane/Oxygen Mixture at Low Temperature
  Published in: Thin Films and Porous Materials (p69)