Papers by Author: Satoshi Nakano

Abstract: Crystal growth velocity of SiC in a process of physical vapor transport was studied on the basis of numerical calculation including compressible effect, convection and buoyancy effects, flow coupling between argon gas and species, and the Stefan effect. Calculation in 2D configuration was performed to clarify the effect of pressure on growth velocity. The results revealed that the origin of diffusion resistance reported so far was the effect of convection of argon gas and chemical species.