Papers by Author: Steven L. Nelson

Paper TitlePage

Uniform Ultrathin Oxide Growth for High-k Preclean
Authors: Jeffery W. Butterbaugh, Steven L. Nelson, Thomas J. Wagener
15
In Situ SymflowTM Etching in an STG® Dryer
Authors: Kurt K. Christenson, Nam Pyo Lee, Thomas J. Wagener, Steven L. Nelson
77
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