Papers by Author: Vytautas Bagdonas

Abstract: This article describes a sub-millimeter micromotor, one of achievements of MEMS (microelectromechanical systems) science that is driven by electrostatic force. A simplified analytical dynamical model for microelectrostatic motor is presented. The model involves formulas for calculation of non-fringing electrostatic field forces for any rotor and stator pole combination, for any number of poles. Both tangent and normal forces are derived. The article shows how to increase torque created by tangential force and how to decrease friction created by normal component. The model is useful for development of motor control system and further motor analysis. The analytical model is quantitatively compared to finite element model (FEM) created using Ansys and Matlab software. By changing the number of poles in both models, the ripple of the motor torque is researched using both methods.

Abstract: An electrostatic motor is a very complex dynamical system whose performance critically depends on the shape of the rotor and stator, number of poles, clearances between axis and rotor, friction, rotor vibrations, and levitation, etc. There are many possible micromotor constructions depending on the required accuracy, the speed of rotation and power of the motor. This work shows the technology required to build a micromotor using UV lithography. Studies of vibration characteristics using ANSYS and MATLAB modeling software and an experimental analysis to optimize the dynamical properties of the system and to improve its manufacturing process are also shown.