Papers by Author: Y. Xu

Paper TitlePage

Abstract: The thin-film of silicon deposited by RTCVD on pressureless sintered SiC substrate with the size of 30mm×20mm, which is cleaned by ultrasonic method and chemical treatment. The crystal size of silicon columnar grain can reach 190 µm and its preferred orientation is [111] after ZMR process.
1147
77
25
583
1313
Showing 1 to 5 of 5 Paper Titles