Papers by Author: Z.G. Li

Abstract: Temperature variation on accuracy and stability in measurement instruments is an important issue. High performance and miniaturized instruments have rigorous requirements on temperature. Heat transfer and temperature control are important in instruments design. For laser interferometer, temperature variation will adversely affect the frequency stability of the laser and the measuring precision. In order to effectively stabilize the frequency, a simple and effective heat sink design for laser interferometer is presented. It is based on the fractal theory and the heat transfer characteristics to allow higher dissipation for temperature control to generate higher heat transfer area in a finite space. Experimental results in frequency stabilization clearly show that this method is effective.

Abstract: Long range scanning stages with very small positioning errors are the key elements in the nano-CMM that is used to determine the sizes and coordinates of micromachines and parts in three dimensions to realize MEMS/nano technology. A transmission stage needs six degree-of-freedom precision motion controls. A compact critical angle sensor (CAS) can be mounted on the base or frame to be used to monitor the orientation parameters of the scanning/transmission stage along the 3 axes and feedback the error signal of the sensor output to maintain the stage moving performance. By calibration with an autocollimator, the resolution is better than 0.1 arcsec with a measurement range above 600 arcsec.