Papers by Keyword: 6H-SiC Crystal

Abstract: In this work, the mechanical properties, such as Vickers microhardness H_v, fracture toughness K_c, yield strength σ_v and brittleness index B_i, of <0001> oriented 6H-SiC crystal are systematically evaluated using a microindentation technique under 0.1-2 kg applied load. It is found the H_v is decreased as the applied load is increased which is mainly attributed to the effect of indenter penetration. The H_v value can be effectively presumed by Kicks law and the Meyers index n is determined to be 1.73. However, the K_c value is measured nearly a constant (~0.148 MPa.m^1/2) which reveals the toughness of 6H-SiC₍₀₀₀₁₎ crystal is much weaker than those of Si₍₁₀₀₎ and GaAs₍₁₀₀₎ crystals. The variation of σ_v to the load is similar to that of H_v. The brittleness index B_i also exhibits deceasing tendency as the applied load is added.