Papers by Keyword: Arc Ion Plating (AIP)

Abstract: Abstract: NiCoCrAlYSiHf coatings have been prepared by arc ion plating (AIP) on CrNi3MoVA steel ,which their microstructure and isothermal oxidation behavior at 950°C studied using SRD,SEM and EDAX. The results indicate that NiCoCrAlYSiHf coatings substantially increase the high-temperature oxidation resistance of CrNi3MoVA steel and the oxidation process was retarded mainly by the presence of α-Al2O3 oxide scale on the coating. Meanwhile, the major diffusion occured between the substrate element Fe and the coating element Co while Cr mainly distributed in the coating.

Abstract: In order to detect the arc plasma, an in-depth analysis on the relationship between the technology and film properties is conducted in this article. In addition, a fast scanning Langmuir probe diagnostic system suitable for transient plasma diagnosis is also designed, coupled with the design scheme and schematic diagram. Regard the integrated circuit of MAX038 as the core，and utilize FET to input high-fidelity operational amplifier OPA604 as well as high power amplifier PA93 to complete the intelligent saw-tooth wave sweep frequency power with the output amplitude of ± 100V, output frequency ranging from 10Hz to 10MHz as well as the adjustable frequency and duty cycle. Then test the output waveform and the results show that the power module can precisely generate triangle wave, saw-tooth wave, rectangular wave (including square wave) and sine wave signal.

Abstract: Based on plasma physics, basic characteristics of magnetofluid and discharge mechanism of the arc spot, this paper proposes a deposition technology on the inner wall of long tube by magnetic and electric field enhanced arc ion plating. The conical target material structure immersed in the axial magnetic field is adopted as the arc source of arc ion plating. Studies have shown that this technology can achieve the effective coating on the inner wall of long tube, which means to deposit the fatal (Ti, Al) N films at the depth of 120mm in the inner wall of the 20mm stainless steel component. The thickness of (Ti, Al) N film is 0.3-1.5m and its micro-hardness reaches 20GPa, which can significantly improve the wear resistance and corrosion resistance of the inner wall of the components, thereby increasing the service life of stainless steel components.

Abstract: Based on the principle of the control of magnetic field on arc spot motion, a compact and multi-function magnetic field steered arc source has been designed in this paper. The rotating magnetic field generator driven by small DC motors or AC motors has been also equipped behind the base of the target materials of magnetic field steered arc source. The magnet yoke fixed on shaft will be driven by the motors so as to promote the rotation of permanent magnets which are rationally distributed on magnet yoke. The different distribution of permanent magnets will produce the rotating magnetic field with different configuration structures and then the purpose of multi-control mode can be achieved. Meanwhile, the dynamic rotating magnetic field with different configurations have been also produced in this design through employing the simple and compact arc source as well as the permanent magnet with different distributions in order to improve the discharge form of arc spots, control the trajectory of arc spots, improve the utilization of target materials and the uniformity of etching as well as reduce or inhibit the emission of large particles. At the same time, the high-quality film can be also prepared so as to realize the arc spot control with various forms in an arc source, satisfy the different demands and expand the application of arc ion plating.

Abstract: This paper systematically studies the distribution of macro-particles on the surface of film influenced by the substrate position under conditions of the same magnetic field, different pulsed bias voltage and reaction gas partial pressure, and analyzes the mechanism of macro-particles influenced by different parameters. This study indicates that the substrate position has a better effect on decreasing macro-particles than that of the pulsed bias voltage and particles in different substrate position are very different in their forms and appearances, which easily leads to uneven deposition; under the same bias, the number of particles firstly increases and then decreases with the increasing the distance from substrate position to the center, and the number of particles with over 2μm diameter largely decreases with the increasing the distance from substrate position to the center, so surface morphologies of films are improving; under the lower intensity of magnetic field, the distribution of macro-particles has a great change with the increasing the distance from substrate position to the center, and under the higher intensity of magnetic field, the substrate position has little influence on the distribution of macro-particles on the surface of film. Under the higher intensity (30G) of magnetic field, the distribution of macro-particles on the surface of film has minor change whatever reaction gas partial pressure and substrate position increase, and most particles are small in sizes and are solid spherical in shape. The higher intensity (30G) of magnetic field enhances the uniformity of film deposition and decreases the dependency of macro-particles distribution on other parameters.

Abstract: The 2μm thick TiN coatings were deposited by arc ion plating on YW2 cemented carbide substrate, and the system of TiN/YW2 was treated with cryogenic treatment at -196°C for 30 hours. The change of the Rockwell indentation's morphology of the system (the form and density of cracks, the spalling state of the coating)before and after the treatment were investigated by means of the Rockwell hardness tester. With metallurgical microscope and SEM, the change of the microstructure of the substrate and its influence on the fracture toughness of the system were investigated. The results show that after the treatment, the density of the radiated cracks in the substrate were obviously reduced, but the main cracks hadn’t any change, the spalling of the TiN coating along the indentation was lightened. After the cryogenic treatment the dispersed granular γ phase obviously decreased or even disappeared, the pores became smaller and the microstructure of YW2 became more compact，and the microcracks were merged during the cryogenic treatment. These are beneficial to improve the fracture toughness of YW2 substrate and the coating/substrate system.

Abstract: Based on the interaction mechanism of the plasma and the magnetic field, this paper has proposed the deposition process of coupled magnetic field to enhance the arc ion plating. Meanwhile, it has also analyzed the distribution, the polarity and the configuration of coupled magnetic field combining with the finite element simulation. The influence of coupled magnetic field on the distribution, the ionization rate, the surface quality of film and the deposition rate of arc ion plating has been also systematically discussed in this paper. What’s more, the reduction mechanism of coupled magnetic field for the marco-particles on film surface has been also proposed. The studies have shown that the DC coupled magnetic field can not only improve the focusing properties and the transmission uniformity of plasma, but also enhance the collision between ions and improve the ionization rate of plasma and the excitation illumination intensity of ions as well as improve the ion density. With the increase of the strength of DC coupled magnetic field, the number and the size of marco-particles on film surface have been greatly reduced and the deposition rate of film has been exponentially increased. The plasma has been gradually focalized and diverged under the influence of pulsation coupled magnetic field and formed the plasma with a dynamic distribution, which has enhanced the interaction between the plasma and the marco-particles as well as further purified the marco-particles.

Abstract: In this study, composite metastable (Ti,Al,Nb)N coatings were respectively deposited on a wrought martensite steel 1Cr11Ni2W2MoV by arc ion plating technique with different negative pulse bias. With the increase of negative bias, the deposition rate initially increases and then decreases, metallic composition of the coatings deviates from the target more obviously, grain size is refined and the orientation of B1 phase changes from (111) to (220), and the hardness of the coatings improve first and then drop.

Abstract: TiO₂ thin films of different N-doped quantity and different current density were deposited on medical glass slide by arc ion plating. Film structure, surface morphology and optical properties were measured with XRD, SEM and UV-VIS transmittance spectroscope. Photo-catalytic performance of the films was evaluated by degradation methyl orange. The current density, O₂ partial pressure and N₂ partial pressure were varied in order to determine their effect on the properties of TiO₂ films. The study got the best doped process (current 50A，O₂ 50sccm, N₂ 250 sccm, Ar 20sccm). In these experimental conditions, the absorption edge successfully moved to 510nm, the as-deposited TiO₂ films structure was composed with anatase and rutile. The annealing treatment made the crystal microscopy more obviously. The N-doped TiO₂ film not only reduced the UV catalytic performance , but also extended the catalytic properties to the sun light.

Abstract: The object of this article is to make research on the influence of transverse magnetic field and pulse bias on macro-particles on the surface of film, find the systematic law and analyze the influence law and reasons of the two parameters (transverse magnetic field and pulse bias), according to the mechanism of arc spot movement and the interaction between macro-particles and plasma. Moreover, this article aims at seeking the most important influence parameter and comparing the effect of the two parameters. Research in this paper indicates that: the key factor is the magnetic field controlled arc spot movement, because the influence of magnetic field on reducing macro-particles is much larger than bias, and the influence degree of bias on macro-particles varies with the magnetic field intensity; action of bias is obvious under the condition of low magnetic field intensity, but as the magnetic field intensity increases, its action becomes weaker and weaker; besides, purification effect of bias on particles in larger size is better than on particles in smaller size.