Papers by Keyword: Biomedical Sensors

Abstract: Intelligent wearable personal systems enabling, e.g. health monitoring, protection & safety and healthy lifestyle, gained strong interest during the last 10-15 years. New generation of body sensors benefit largely from significant technological advances in terms of intelligence, speed, miniaturization, power autonomy and new materials at lower cost. The symbiosis of textiles with wearable computing, augmented reality, human machine interfaces, media and interface design and the collaboration between established electronics and textile industries are leading to a totally new class of large-area, flexible, conformable informative and interactive wearable systems. Further research across disciplines like micro-nano technologies, materials, physiology/biology/medicine and information & communication technologies is necessary in order to achieve highly performing, user-friendly and cost-effective wearable systems. This article presents the state-of-the-art of smart wearable integrated systems for personal applications, outlines current research achievements and discusses trends and challenges for technology, systems and applications.

Abstract: Silicon Carbide has proven its strong interest for power and high frequency devices but it also has superior characteristics for application in the sensors and MEMS fields. The characteristic requirements of the starting material are different from that of power devices since the level of defects is not so critical while the layer stress is important especially in 3C-SiC on Si. The keyprocess for MEMS fabrication is the etching, which is progressing thanks to ICP process improvements. A perfect control of the etching step could allow the obtention of nano-resonators in SiC with fairly superior characteristics to the Si ones. Other electrical sensors for high temperature application such as gas sensors or Hall sensors have been also successfully developed taking profit of the deep etching process improvement and high temperature contact developments.