Papers by Keyword: Bulk Mobility

Abstract: We present a calibrated bulk mobility model for 4H-SiC. Hall measurements are performed on 4H-SiC samples to determine the bulk mobility/resistivity in the temperature range of 200-500K. We observe that temperature dependence of bulk resistivity cannot be predicted by popular mobility models available within TCAD tools. A careful investigation reveals that these popular mobility models need to be revised and replaced by a comprehensive model that can describe the impurity scattering effects dominant at low temperatures. We present a well calibrated bulk mobility model for 4H-SiC exhibiting excellent agreement with measured data, making it suitable for device simulation purposes using TCAD tools.

Abstract: Micro-Raman spectroscopy has been used to study the dependence between the carrier concentration and electrical mobility in n-doped 3C-SiC films grown on (111) and (100) Si oriented substrates. Local stacking variations observed on the (111) 3C-SiC surface lead to a worse crystal morphology compared to (100) 3C-SiC films resulting in a decrease of the average bulk mobility.