Papers by Keyword: Conditioner

Abstract: Comparing with the common jet refrigeration system, a central air conditioner combined with solar ejector refrigeration system was proposed. The system characteristic was presented. It can improve the coefficient of the single solar system and solve operation problem for day-and-night, and can reduce the energy consumption of central air conditioner. A reasonable ejector to match with the central air conditioning is a main component in the system. The ejector in the solar refrigeration system is preliminary analyzed by the pneumatic function method. It will provide the important reference to improving the conditioner performance and system efficiency on air conditioning energy saving.

Abstract: The calculating model of surface non-uniformity of polishing pad and the kinematical model between polishing pad and conditioner are initially established. Then the effects of several conditioning parameters were investigated by using the two models. The results of simulation and calculation show that the width ratio of diamond band of conditoner and the rotation speed at the same speed ratio between pad and conditioner have little effect on the surface non-uniformity of polishing pad, while at high non-integer rotation speed ratio, the surface non-uniformity of polishing pad is better than that at low integer speed ratio. The research results are available to select appropriate conditioning parameters especially for the stringent requirement of within-wafer non-uniformity in next generation IC.