Papers by Keyword: Double Sided Polishing Machine

Abstract: Double-sided polishing machine is widely used to high precision dimension, high accuracy surface, and ultra-smooth surface without damage layer for some hard and brittle workpiece such as silicon wafer, sapphire, ceramic, magnetic substrates, electronic materials, etc. Pneumatic loading system is the very crucial part of the double-sided polishing machine. The polishing machine’s performances are directly determined by the loading precision. This paper establishes the modeling and simulation of pneumatic load system by AMESim and then gives optimization parameters to improve system performance, and the cure of load capacity is given.

Abstract: Based on virtual prototyping technology, dynamic simulation of PE-1 type ultra-precision double-sided polishing machine and its technologic parameter optimization was studied. Through the simulation of virtual prototype, which was built in ADAMS, the polishing process was analyzed. Firstly, the simulation of polishing process shows that the ratio of rotation and revolution angular speed is inversely proportional to input speed ratio of planetary system. Secondly, the simulation of movement route shows that points along the same radius have similar route style considering the same input speed ratio of planetary system. Thirdly, the optimization of material removal non-uniformity shows that the higher speed makes for higher removal quality, the speed of solar gear and gear ring is opposite when the optimum value reached. At last, the maximum removal rate was achieved on the condition of same press and speed of plate, and corresponding solar gear speed and gear ring speed were gained.