Papers by Keyword: Electrothermal

Abstract: This paper presents the design, fabrication and characterization of single beam for latching electrothermal microswitch. This microswitch consists of two cantilever beams using bimorph electrothermal actuator with mechanical latching for performing low power bistable relay applications. A stable state can be acquired without continuous power which is only needed to switch between two stable states of the microactuator. The single beam is discussed mainly to judge the possibility of realizing the designed function. First, reasonable shape of the resistance is designed using finite element analysis software ANSYS. Then, mechanical performance was characterized by WYKO NT1100 optical profiling system, the tip deflection of single beam can meet the designed demand.

Abstract: In this paper we have presented an assembly unit equipped with electrothermally actuated microclamps (MCs), piezoelectric pad and rotary table to provide an environment for micropositioning and microclamping of submilimeter parts. The structural material of the system is considered to be <100> oriented Si with 20 µm thickness. Activating MCs, two approaches performed in the simulation procedure and results showed that utilizing 140 nm deposited Chromium thin layer on the U-shape structure as active material, reduces the overall input voltage and temperature in comparison with direct applying of potential difference to Si structure. To obtain more realistic results, both of these methods are simulated using finite element software in line with considering temperature-dependent thermophysical properties for structural and active material due to high operating temperatures. Design strategies and other advantages of using thin layer of chromium as active material are highlighted in the text.

Abstract: In this work, we present the characterisation of an electrothermally actuated microgripper that operates in both dry and liquid media, and shows improved performance versus existing devices. The microgripper, fabricated in a combination of polymeric (SU8) and conductive materials (Au), is able to produce displacements up to 110 μm in air and 30 μm in liquid. In both cases, the voltage and the electrical power required is minimal (less than 3 V and 180 mW respectively) and so both, high temperatures and electrolysis, are prevented. Micromanipulation experiments have successfully demonstrated the gripping, holding and transport of mice oocytes (approx. diameter 100 μm) in a biological media.