Papers by Keyword: Etching Mask

Abstract: Trench structure etching is one of the most important processes for the fabrication of 4H-SiC Trench MOSFETs. This paper introduced Al₂O₃ as an etching mask for the fabrication of trench structures. The effect of dry etching parameters to the shape of trench structures were studied systematically. Micro trenches were successfully eliminated from trench structure etching process and preliminary trench MOSFET test structures were fabricated and characterized.

Abstract: Reflection losses of light at the silicon surface cause a reduction in conversion efficiency of silicon solar cell. There is anisotropic etching silicon to form a textured structure on the silicon surface by a simple wet process as a method of reducing the reflectivity. Further, miniaturization of the textured structure to the nanosize will improve the conversion efficiency by reducing the reflectivity. In this study, we formed texture structure of 1 μm size by applying the particles on a silicon surface as an etching mask.

Abstract: This paper presents a simple but reliable fabrication process for microfluidic devices on glass substrate using wet etching technology. Instead of using expensive Pyrex glasses as substrates and depositing expensive metal or polysilicon/amorphous silicon as etch masks in conventional method, glass slide is used as substrate and a single-layer negative photoresist RFJ-220 is used as the etching mask. The etch rates, generation of defects, undercut ratio and surface roughness are studied. In order to achieve high etching depth and smooth surface, buffered oxide etching with hydrochloric acid as additive is proposed. By proper cleaning and long-time hard baking, the undercut ratio can approach to 1. An 110μm depth microchannel with smooth surface is achieved. This fabrication process leads to a considerable reduction of process steps, fabrication time and material consumption. With this technique, we successfully fabricated a microfluidic device, which is used in the capture of hepatoma cells HepG2.