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Papers by Keyword: Hot-Wire

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Investigation of Low-Cost Copper Interconnection Cleaning Using Hydrogen Radicals Generated by Heated Catalyst

Authors: Y. Kumashiro, S. Ikeda, Akira Izumi

Abstract: We investigated hydrogen radical copper cleaning via the hot-wire method using only a rotary pump for the vacuum exhaust system. The copper oxide surface was successfully reduced. The treatment also increased the resistance of copper to oxidation.

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A Novel Surface Cleaning for Copper Interconnection Using Ammonium Decomposed Species Generated by Hot Wire

Authors: Akira Izumi, Tomoya Ueno

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Large-Area Polycrystalline p-Type Silicon Films Produced by the Hot Wire Technique

Authors: Isabel Ferreira, Rodrigo Martins, A. Cabrita, Francisco Manuel Braz Fernandes, Elvira Fortunato