Authors: Amelia Nuraisyah Quinsi Jemy, Kushendarsyah Saptaji, Farid Triawan, I. Ifat, Iwan Setiawan
Abstract: Chemotaxis microfluidic devices are one type of lab-on-a-chip (LOC) devices that functions to minimize the volume of sample used and the testing time by conducting an analysis on a smaller scale. Chemotaxis microfluidic devices consist of micro-scale features that are delicate to be produced using conventional manufacturing methods. Chemotaxis microfluidic devices are generally manufactured using soft lithography. This study attempts to apply hot embossing process to replace soft lithography process, in which the hot embossing mould was fabricated using 3D printing, especially digital light processing (DLP) methods. This project investigates the challenges of fabricating the hot embossing mould of chemotaxis microfluidic device using DLP 3D printing. Three printed orientations for the moulds were produced and compared. The three moulds are subsequently used in the hot embossing process to produce chemotaxis microfluidic devices on poly(methyl methacrylate) (PMMA) substrate. The performance of the moulds is compared to the mould produced by micro-milling process using qualitative (visual analysis) and quantitative (dimensional analysis) methods. The analysis shows that DLP 3D printed moulds have comparable quality with those produced by micro-milling. The printing orientation has significant effect on the dimensional differences between the mould and design with mould WT (area of width and thickness attached to the platform) has the smallest dimensional differences.
183
Authors: Anagdha Sharma, Sivanandam Aravindan, Paruchuri Venkateswara Rao
Abstract: Anti-reflective polystyrene nanopillar arrays were fabricated by the process of hot embossing where it utilizes the nickel coated anodised aluminium oxide template. Electroless plating being a catalytic method of plating uniformly coats the membrane which increases its strength. The supporting layer of nickel makes AAO template suitable to be used as a mould multiple times. Highly conformal nanopillars of average diameter 400nm and length 30 μm to 50μm were fabricated on the area of ⁓5cm2. Hot embossing process ensures repeatability with precision and high throughput. The enhanced light entrapping is attributed to the multiple internal reflection in the nanopillars of high aspect ratio.
3
Authors: Yeong Lin Lai, Chi Cheng Chiu
Abstract: This paper presents the nanofabrication of polymer biosensor structures for biomedical applications. The polymer biosensor structures were achieved using hot embossing technology. The pressure effects on the replication of patterns during the hot embossing of the polymer biosensor structures were investigated. The fabricated polymer biosensor structures with pillar arrays were applied to immunoassay biochips. The pillar shapes of the polymer biosensor structures provided large surface areas and improved the antibody-antigen interaction of the immunoassay biochips.
155
Authors: Gang Cheng, Jean Claude Gelin, Thierry Barrière
Abstract: The experimental processing parameters, such as applied pressure and forming temperature have been analysed during polymer hot embossing of micro-cavities. The viscoelastic characteristics of polymer above the glass transition temperature have been investigated with the classical viscoelastic models. Generalized Maxwell Model has been used to describe polymer behaviours in the glass transition temperature range. The parameters include relaxation time, storage modulus and loss modulus of the Generalized Maxwell Model that have been introduced. The identification of polymer characteristics has been carried out through Dynamic Mechanical Analysis (DMA). The storage modulus, the loss modulus and the damping factor of the selected polymer have been obtained with different imposed frequencies. The master curve of complex modulus has been obtained by applying the time temperature superposition principle. The experimental data has been identified with optimized fitting parameters of Generalized Maxwell Model. A proper agreement between the experimental measurement and the identification of viscoelastic model is observed. The resulting constitutive equations have been implemented in finite element software in order to achieve the numerical simulation of the hot embossing process.
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Authors: Ching Bin Lin, Zue Chin Chang, Jin Shin Ho, C.F. Hsiao
Abstract: Hot-embossing experiments were conducted on poly (methyl methacrylate) orthogonal arrays with base widths of 1μm, 3μm, 5μm, 10μm, and 50μm. The relationship between the base width with respect to average molecular weight and number average molecular weight of micropattern were also investigated. It was discovered that the average molecular weight and number average molecular weight decreased as the base width increased.
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Authors: Rajeeb Kumar Jena, Chee Yoon Yue
Abstract: The fabrication of polymer based microfluidic devices using the hot embossing technique and their surface modification for easy fluid flow through the devices has been a growing field of research. During hot embossing, the replication fidelity on polymer substrate not only depends on the processing parameters such as temperature, pressure and time but also on their chemical structure which affects their thermo-dependent viscoelastic properties. For copolymers such as cyclic olefin copolymer (COC) which comprises ethylene and norbornene units, such properties depend on their relative ethylene and norbornene content. We report in this paper, a systematic study of replication fidelity and surface modification on COC polymer with varying norbornene content from 65 to 82 wt%. Replication fidelity which includes the surface morphology and cross-section profiles of the microchannel were characterized using SEM and Confocal microscope respectively. The modified surface was evaluated using Fourier transform infrared spectroscopy (FTIR spectroscopy) and water contact angle measurement. It was observed that in hot embossing, higher norbornene content contributed to good replication fidelity at identical experimental conditions. Furthermore, it was observed that with increase in norbornene content, the grafting efficiency decreases resulting in poor surface modification.
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Authors: Keigo Kuroda, Takayuki Komori, Hirofumi Saito, Ryuta Ikoma, Yota Kimura, Hiroki Komatsuzaki, Kenta Suzuki, Sung Won Youn, Hiroshi Hiroshima, Ryutaro Maeda, Yasushiro Nishioka
Abstract: Flexible micropumps are important components for advanced microfluidic systems. Here, polyimide (PI) for flexible micropumps was focused on. This is because PI has many advantageous properties such as good biocompatibility, high thermal stability, and superior mechanical strength. However, the difficulty in realizing an all-PI micropump lies in fabricating microstructures on PI film surfaces. In this paper, we present improved performances of a flexible all-PI micropump fabricated using high-temperature hot embossing above 320 oC that is considerably higher than its glass transition temperature of 275 oC. The fabricated micropump had diffuser/nozzle valves and a chamber with 5 mm diameter, and it was functioned by vibrating a 2-µm-thick PI diaphragm with alternating air pressures outside of the diaphragm. The flow rate of deionized water in the micropump reached to 110 μl/min at 3 Hz.
1360
Authors: Hirofumi Saito, Hiroki Komatsuzaki, Ryuta Ikoma, Takayuki Komori, Keigo Kuroda, Yohta Kimura, Yudai Fukushi, Hirotaka Maenosono, Syohei Koide, Masahiro Satano, Yasushiro Nishioka
Abstract: Improved fabrication processes of an all-polyimide micro electroosmotic flow pump using hot embossing are described. Microchannels in the micropump were fabricated by hot embossing on a transparent polyimide substrate. A silicon micromachined mold was pressed into the transparent polyimide substrate at a temperature of 300 oC to form microchannel patterns on the substrate. The depth and width of the microchannels were 25 μm and 50 μm, respectively. A UV ozone treatment was performed to improve adhesion between the transparent polyimide substrate and film capping layer. This UV ozone treatment enhanced adhesion and resulted in the reduction of the adhesion temperature as low as 100 oC, and nearly no deformation of the microchannels was observed. As a result, the electroosmotic flow pump exhibited the flow rate of 0.7 μl/min when a voltage of 50 V was given between the electrodes separated 20 mm each other.
1356
Authors: Hirofumi Saito, Hiroki Komatsuzaki, Ryuta Ikoma, Takayuki Komori, Keigo Kuroda, Yohta Kimura, Yudai Fukushi, Hirotaka Maenosono, Syohei Koide, Masahiro Satano, Yasushiro Nishioka
Abstract: Improved fabrication processes of a micro electroosmotic flow pump using hot embossing are described. The microchannels in the micropump were fabricated by hot embossing on a polymethylmethacrylate (PMMA) substrate. A silicon micromachined mold was pressed into the PMMA substrate at a temperature of 145 °C to form microchannel patterns on the substrate. The depth and width of the microchannels were 50 μm and 100 μm, respectively. Aluminum electrodes were deposited using thermal vacuum deposition. A UV ozone treatment was performed to improve adhesion between the PMMA substrate and a PMMA capping layer. This UV ozone treatment enhanced adhesion and resulted in the reduction of the adhesion temperature as low as 70 °C, and nearly no deformation of the microchannels was observed. As a result, the electroosmotic flow pump exhibited the flow rate of 0.5 μl/min when a voltage of 50 V was given between the electrodes separated 8 mm each other.
125
Authors: Yung Chou Chen, Chao Heng Chien, Yu Sz Lin
Abstract: This paper focus on biotechnology research in the separation of nano particles, the hot embossing process technology is used to design and produce a fast separation of nano particles within embedded QCM electrodes into the flow channel as one of the DEP electrodes, the DEP-QCM chip to enable rapid detection of separation. This DEP-QCM chip as a test platform to confirm the separation efficiency.
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