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Keyword: "Hydrophobic Surface"
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Paper Title Page

Heavy Water in Gate Stack Processing

Authors: Andrea E. Pap, Csaba Dücső, Katalin Kamarás, Gábor Battistig, István Bársony

119

Single Wafer Hydrophobic Surface Preparation on 300mm by HF Vapor

Authors: Thierry Salvetat, Olivier Pollet, Pascal Besson, Névine Rochat

11

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