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Papers by Keyword: IBIEC

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Dose Rate and Temperature Dependence of the Crystallization Rate during IBIEC in InAs

Authors: Robert Schulz, T. Fehlhaber, E. Glaser, F. Schrempel

257

Ion Beam Induced Epitaxial Crystallization of Buried SiC Layers in Silicon

Authors: J.K.N. Lindner, K. Volz, B. Stritzker

73