Papers by Keyword: Implanted

Abstract: Advanced device is more sensitive to material loss and dopant fluctuation, that might strongly influence device performance. Conventional dry ash process for implanted photoresist strip can not meet the requirement of material loss minimization of advanced device. Full wet process for resist strip was first successfully demonstrated at 22nm structure wafer to gain 50% silicon loss reduction. Besides, full wet process also demonstrated defect cleaning performance was even better than conventional approach. This work focused on mechanism study of Si₃N₄ and SiO₂ film loss induced by high temperature SPM process.

Abstract: Photoresist stripping in IC manufacturing has become more challenging as the number of photoresist levels has increased while at the same time allowable material loss and surface damage has decreased. Heavily implanted photoresist is especially challenging due to the dehydrogenated, amorphous carbon layer that forms on the surface [1]. To facilitate implanted photoresist removal, this layer can be attacked by physical processes such as ion bombardment as part of the common dry ashing approach. However, these physical approaches can lead to surface damage and increased material loss. Another approach is to increase the reactivity of the sulfuric acid – hydrogen peroxide mixture (SPM), so that it can penetrate and dissolve the amorphous carbon layer and achieve complete photoresist removal.

Abstract: The in vivo study was performed to evaluate the biocompatibility and osteogenous ability of injectable fast-setting calcium phosphate cement (CPC). Eighteen four-week-old New Zealand white rabbits were divided into six groups randomly, three in each group. According to the principle of selfcontrast at the same time, cavities of 5mm in diameter and 6mm in depth were drilled in femoral condyle of rabbits. The materials were implanted into cavities of the left leg, the right leg as the blank control group. Rabbits were sacrificed at 2, 4, 8, 12, 16 and 24 weeks after surgery. The microstructure of specimens was observed using ESEM. The results showed that injectable fast-setting CPC had good fluidity and plasticity; it could be injected into bone defects and fast-set in situ. The start setting time was 5-8 min and the compressive strength was 25-30 MPa. The CPC had good biocompatibility and osteoconductivity, and benefited to the repair of bone defects.