Papers by Keyword: LVT

Abstract: This research is to extend Ziegler-Nichols based PID controller design method to the intelligent fuzzy PID controller design of a Scanning Probe Microscope (SPM) system, thus the relative stability can be reserved. In addition, one can see the hysteresis and parameters variation effects of the force actuator can be reduced. This improvement had been verified by practical implementation. Comparing the results with the design with the Ziegler-Nichols based PID controller, one can see that the proposed system is more robust.

Abstract: The key point of this research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implementation of a surface profiler to reduce the hysteresis effect of the force actuator.