Papers by Keyword: Micro-Mirror

Abstract: Development of micro-mechanical sensors and systems based on them is one of the development branches in microelectronic technology and labeled as one of the technologies of the 21-st century. The relevance and significance of the paper related to the methodology creation for the development and manufacture of micro-mirror with large rotation angle. Methodology was based on an integrated approach to solving such problems as the processes of surface preparation, etching of the complex profile surfaces, matching the silicon structures, etc. which allows to create MOEMS elements.

Abstract: In order to realize more compact and in particular cost-effective spectrometers MOEMS technology offers attractive possibilities. Based Littrow spectrometer structure for the near-IR, a micro mirror grating spectrometer has been designed and developed. The ZEMAX was used for designed this structure. The resolution of this design is 10nm, the spectral range from 900nm to 1400nm. A scanning micro mirror is the key element of this IR spectrometer set-up. This micro mirror is driven by electromagnetic force. Before fix the micro mirror, it was calibrated. Meanwhile, for reducing the cost of this system, the silicon silt was designed and fabricated. For resolution testing of this spectral system, we used one light correction filters finished this experiment. The test result has shown the resolution of this spectrometer is16.8nm. Finally, the relation between the spectral line scanning characteristic and wavelength spectral resolution was discussed.

Abstract: This paper reports on the simulation and characterization of a microelectromechanical system (MEMS) micromirror fabricated with PolyMUMPs. The overall diameter of the hexagonal micrimirror, including mirror plate and 3 supporting cantilevers fixed around, is 450um. A 3D model is built in finite element method (FEM) with COMSOL. Simulations of the elevated height of mirror plate, pull-in voltage and eigenfrequency of the micromirror are carried out. The static and dynamic performances of the fabricated micromirror are characterized by Veeco Optical Profiler and Polytek MEMS System Analyzer. The comparison between measurement and simulation exhibits good concordance. Surface topography measurement shows the elevated height and stress-induced concave deformation of mirror plate almost the same scale as demonstrated in FEM simulation. The Pull-In voltages are measured to be around 32V in current-voltage curve which is almost the same as in FEM simulation with one electrode biased. The fundamental resonant frequency is measured to be 4.3k Hz in torsional motion and 4.9k Hz in piston motion.

Abstract: A programmable micro mirror has been used in a near infrared spectrometer in order to achieve the purpose of signal multiplexing, to solve the problem of low luminous flux when using single slit and to increase the signal-to-noise (SNR) ratio. Use Hadamard Transform (HT) and programmable micro mirror as its encoding mask to detect the whole spectrum with a single detector, research and analyze the enhancement of SNR of the weak signal. First of all, the mask symbol number is fixed as 63-order based on the Hadamard Transform principle, calculate the optimal S-Matrix, and then the encoding mask has been realized by micro mirror. At last, carry out some experimental verifications as well as data analyzing, discuss the alternating spectrum signal which produce an effect on transformational algorithm, bring out the coadded upswing plan. The result shows that: the conflict of resolution and SNR can be well settled with Hadamard multiplex. The SNR can be increased by the factor of 3.5, which is identical with the theoretic result.

Abstract: Optical interferometric sensors represent the most advanced measurement tools in terms of precision and sensitivity for position detection. Micro-mechanical and micro-optical active and passive devices can be realized with present technologies on integrable substrates such as silicon wafers. We are working on the fabrication and characterization of micromirrors realized with micromachining technique. Our goal is to realize structures with a mechanical resonance frequency in ranges 1 kHz – 100 kHz and 1 MHz – 100 MHz. In these ranges we can think of different applications above all in the detection of gravitational waves and in quantum computation.

Abstract: In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.