Papers by Keyword: Micro Electrochemical Machining (Micro ECM)

Abstract: This study describes a new module that uses micro electrochemical machining, and a new design of a convex-shaped tool, in a precision reclamation process to remove defective Indium-tin-oxide (ITO) nanostructures from the optical PET diaphragm surfaces of a digital-paper display. This process takes very little time to remove the ITO layers easily and cleanly and is highly efficient both technically and economically. A small end radius of the cathode or a thin cathode of the bulge-form tool takes less time for the same amount (20 nm) of ITO removal. A large diameter of the cathode of the bulge-form tool combined with a small gap between the cathode and the workpiece corresponds to a higher removal rate of ITO. A high rotational speed of the bulge-form tool can also improve dregs discharge and allows a higher feed rate of the optical PET diaphragm. This higher feed rate combined with enough voltage results in a shorter machining time.

Abstract: A micro Electrochemical Machining (ECM) system has been developed, and macro/micro complex feed mechanism has been presented in order to achieve high-resolution. A nanosecond pulse power supply for micro-ECM has been developed, and the minimum pulse width can reach 50 ns. Complementary chopper circuit has been designed to avoid waveform distortion, which can achieve higher pulse frequency. A series of ECM experiments using the machining system have been carried out, and results of tests have proved that high-resolution spindle, and high frequency, short pulse width power supply help to achieve better quality surface, higher machining accuracy.

Abstract: In micro electrochemical machining (micro ECM), side-insulation of tool electrode can significantly improve the machining accuracy, especially for high aspect ratio structures. This paper presented a new side-insulation approach for not only micro single electrodes but also micro array electrodes, in which spin-coating and room curing are used to coat the micro tool electrodes with a very thin film of polymer, followed by an end-rubbing process to remove the insulation material from the electrode end surfaces. Processing parameters of spin-coating were optimized experimentally, and side-insulated micro single electrodes with a double-layer epoxy coating of 3m thickness were prepared. Experiments were made to test the performance of the side-insulation film under simulated micro ECM conditions. And the results demonstrated good insulativity and high adherence strength in a 6-hour durability test. Also side-insulation for micro array electrodes was performed using this approach.