Papers by Keyword: Miniature EACVD System

Abstract: The magnitude and the uniformity of the substrate temperature are the most important factors that affect the quality and the growth rate of diamond films deeply. In this paper, the model of the swing substrate temperature field is established according to the heat transfer theory in Miniature EACVD System, the effects of the hot-filament parameters and the substrate swing parameters on the magnitude and uniformity of the substrate temperature were discussed. The calculated results show that the hot-filament parameters have great influence on the magnitude of the substrate temperature , the results also show that the hot-filament number , the substrate swing angle and the distance between the hot-filament and the substrate affect the uniformity of the substrate temperature field deeply. All the results provide a basis for optimizing the parameters of deposition in Miniature EACVD System.

Abstract: The uniform distribution and the stability of the substrate temperature are the most important factors that deeply affect the quality and the growth rate of diamond films. In this paper, cemented carbide cutters were chosen for substrates, the 3D finite element (FE) model of filaments and substrates was developed in ANSYS 8.0, the calculated results show that the substrate temperature is influenced by the filament temperature, filaments diameter, the quantity of the filaments and the distance between the filaments and the substrates. The 3D finite element model of filaments and substrates also provides a basis for selecting the parameters to obtain uniform diamond films in miniature EACVD system.