Papers by Keyword: Nanoprobe

Abstract: The texture and characteristics of surface have been becoming the leading factors to achieve the designed function of products successfully. So the measurement of surface texture is more and more important. A kind of new multi-function fusion measurement method for surface texture is presented in the paper. Four kinds of different scale measurement methods such as microscopy image measurement, vertical scanning white light interference measurement, white light interference nanoprobe measurement and white light interference diamond-probe measurement are fused for the surface texture multi-function fusion measurement in this method.

Abstract: The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

Abstract: Using a nanoprobe system, we have studied the wetting and the contact properties of Ga with Au, TiN on Al, SiO2 and carbon nanotubes in micro and nano meter scale. Some new phenomena have been observed.