Papers by Keyword: Nanoroughness

Abstract: In metrology, a measurement process without uncertainty evaluation is incomplete. The same applies to nanoroughness metrology. In this paper, Scanning Electron Microscopy (SEM） measurement uncertainty of nanoroughness is studied based on ISO Geometric Product Specification and Verification (GPS). The uncertainty propagation model of SEM-based nanoroughness measurement is presented. The evaluation model of SEM-based standard measurement uncertainty is conducted. As a case study, the line edge roughness uncertainty produced by the JSM-6700F SEM is evaluated.

Abstract: Motif parameters were introduced to characterize line edge roughness (LER) of a nanoscale grating structure. Firstly with electron beam lithography employed the expected nano-scale grating structure with linewidth of 16 nm was fabricated on positive resist. Then the line edge profiles of the structure were extracted and their LERs were characterized. The results showed that the evaluation method is rather simple, effective and recommendable.