Papers by Keyword: Nanoscale Device

Abstract: With the progress of instrumentation in nanoscale visualization, tremendous sicentific dicoveries and understanding has been made. A great breakthrough in nanotechnology came with the inventions of scanning tunneling microscope in 1982 and atomic force microscope in 1986. These revolutionary inventions opened the nanoworld to scientists and engineers by visualizing it with atomic resolution. However, the lack of efficient nanomanipulation capability has become a bottleneck for creating devices using nanocomponents both in the research community and industry. This paper presents the stateof- the-art of nanomanipulation concepts, manipulator designs, manipulator systems. Such an approach has certain advantages over existing designs which have such limitations as device sizes orders of magnitude too large for in situ applications and further device miniaturization restricted due to the adverse effect of physical scaling laws.

Abstract: Neutral beam etching is proposed as a candidate for reducing plasma-process-induced damage in nanoscale devices. In this paper, neutralization of ion beams due to both gas phase collisions and ion surface interactions based on a PIC (Particle in Cell) simulation of realistic Capacitively Coupled Plasma is presented. It was found that a satisfactory degree of neutralization might be achieved by a combined effect of charge transfer and surface collisions.