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Articles by keyword: «Pad»

• A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
  Published in: Advances in Abrasive Technology VI (p433)
• A Preliminary Model Accounting for the Suction Pressure in CMP Process
  Published in: Progresses in Fracture and Strength of Materials and Structures (p737)
• A Study of the Form Error Compensation for Aspherical Lens Machining
  Published in: Advances in Abrasive Technology V (p369)
• Calculation on Temperature Rise of CMP Process: Roughness Effects Considered
  Published in: Physical and Numerical Simulation of Materials Processing (p1348)
• Contribution of Porous Pad to Chemical Mechanical Polishing
  Published in: Nanoscience and Technology (p1133)
• Effect of Pad Surface Asperity on Removal Rate in Chemical Mechanical Polishing
  Published in: Ultra-Precision Machining Technologies (p256)
• Fuel Characteristics Research and Regression Analysis for Blend Fuel of Biomass and Coal
  Published in: Frontiers of Green Building, Materials and Civil Engineering (p2006)
• Pad Effects on Slurry Flows in CMP System
  Published in: Physical and Numerical Simulation of Materials Processing (p1222)
• Pad Surface Characterization and its Effect on the Tribological State in Chemical Mechanical Polishing
  Published in: Advances in Abrasive Technology VI (p383)
• Simulation on Temperature Distribution in Chemical Mechanical Polishing
  Published in: Progresses in Fracture and Strength of Materials and Structures (p1671)
• The CMP by Polishing with GiP Dressed by BODD
  Published in: Advances in Abrasive Technology XIII (p1013)