Papers by Keyword: Parylene

Abstract: This research presents the development of parylene thin-film deposition from the micrometer scale to nanometer scale. Processes improved film uniformity by 6% in the nanometer scale to meet the requirements of new applications of parylene, such as the delamination layer of organic light-emitting diodes, the dielectric film of through-silicon-via, and water-proofing mobile phones. The application and process of water-proofing mobile phones is also examined. The tested mobile phone was coated with a 0.5 μm parylene coating and functioned properly while submerged underwater. The mobile phone is still operational; thus, nanoscale parylene deposition is a novel application for water-proofing mobile phones. The application does not concern problems associated with parts assembly or damaged rubber material.

Abstract: This paper presents a lateral thermally-actuated and laterally capacitive shunt MEMS switch utilizing parylene as the dielectric layer. The bulk maicromachined switch consists three parts which, including coplanar waveguide (CPW) line, switching plates and thermally actuated structures. Measured results show that the threshold driving voltage and current of the proposed switch are 11.5V and 95mA, the single side and both side isolations at close-state are 7.7dB and 10.2dB at 18GHz when parylene thickness is 530nm, respectively. With 80nm- thick parylene, the single side and both sides isolations are 11.2dB and 15.7dB at 18GHz, respectively. The insertion loss at open-state is below 0.26dB up to 18GHz, when a boding wire is used to bridge the ground line.

Abstract: Parylene C, an emerging material in microelectromechanical systems (MEMS), is now widely applied to neural prosthesis devices, such as artificial retinal implants, due to its well-known biocompatibility and ability to be easily patterned by oxygen plasma etching. This work presents a flexible parylene-based microelectrode array（MEA）using MEMS techniques aiming for the chronic subretinal stimulation. The MEA was successfully manufactured and inserted into the subretinal space of a rabbit eye by a novel surgical operation. Optical Coherence Tomography(OCT) showed that a chronic implantation of parylene-based electrode arrays in the rabbit retina over a three month follow-up period demonstrated that the present chip system has a good biocompatibility with the subretinal organs without obvious damages.