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Articles by keyword: «Polishing Slurry»

• An Alkaline SiO₂ Slurry for Fine Atomizing CMP
  Published in: Mechanics, Solid State and Engineering Materials (p258)
• Effect of Operated Parameters on Removal Rate and Surface Roughness in Precision Atomization Ultra-Polishing Process of Copper Surface
  Published in: Manufacturing Process Technology (p4141)
• Experimental Research on Flow during CMP Processes
  Published in: Advances in Abrasive Processes (p85)
• Study on Material Removal Rate of CMP 6H-SiC Crystal Substrate (0001) C Surface Based on Abrasive Alumina (Al₂O₃)
  Published in: Ultra-Precision Machining Technologies (p250)
• Study on Ultra-Precise Machining of CLBO Crystal
  Published in: Advances in Grinding and Abrasive Technology XIII (p398)