Papers by Keyword: Positioning Table

Abstract: A new 2-DOF precision positioning table of high speed and accuracy, directly driven by voice coil actuator, is put forward. And a novel elastic decoupling mechanism is introduced in the table. In order to study its dynamic characteristic when the table works at high speed and high acceleration, the table FEA model is built and the FEA is carried out. Based on the FEA results, the position planes displacement on X, Y and Z axis of the 2-DOF table is simulated respectively, the simulation results can provide reference for the table dynamic structural design.

Abstract: A new 2-DOF positioning table of high speed and accuracy, directly driven by voice coil actuator, is put forward. And a novel elastic decoupling mechanism is used in the table. As the key component of the elastic decoupling mechanism, the flexure hinge is studied, including its stiffness, maximum stress and inherence frequency. The analysis results show that the flexure hinge meets the design requirement.

Abstract: In order to improve the precision and efficiency of IC packaging for wafer wire bonding equipment, a new 2-DOF positioning table of high speed and accuracy, directly driven by voice coil actuator, is put forward. By establishing dynamic model of VCA and positioning table, the electromechanical coupling control system based on minimum deadbeat response controlling algorithm is proposed. The prototype experiment shows that the new 2-DOF positioning table is robust and of good dynamic performance.

Abstract: . Precise positioning and trajectory tracking control applications are important for industrial manufacturing and scientific research. Ball-screw, worm-gear, and power-screw driven systems are widely used for this purpose. Since power screw driven systems provide long range and allow precise servo control, they are commonly preferred. The control strategy developed for power screw driven systems is expected to be robust, to respond rapidly for fast tracking performance and to reject disturbances. These systems should also be controlled precisely in case of uncertainties. In order to enhance the overall system controllability, sliding mode control is one of the preferred strategies. In this paper, sliding mode control strategy developed for a power screw driven positioning table is introduced. Mathematical models of the power screw, positioning table and actuator subsystems are derived. An experimental positioning table setup consisting of a power screw is manufactured to which the developed controller is deployed for testing. The stability of the sliding mode controller is investigated in detail and its performance is compared to that of a PID controller for verification purposes.